In this paper, the authors described the temperature characteristics and the method for temperature compensation of the high precision accelerometer. The principle of the influence of temperature on the output characteristics of accelerometer was analyzed in theory and the temperature coefficients of the accelerometer model were calculated by the tests. In order to find out the resolution of the accelerometer to the temperature minimum change and the influence of a large scale change of the temperature, the model temperature coefficients were tested in small distance change at a specific temperature and large distance change. The results of the tests indicate that the input axis misalignment shifts according to a certain rule when the temperature changes. The parameter of the input axis misalignment shifts with the change of temperature was considered when the temperature compensation model of the accelerometer was built, which had never been considered in the other reports. The veracity of the temperature compensation model was validated according to the tests in which the temperatures were changed manually.